PHI 710 Auger Electron Spectroscopy

Product Overview

The PHI 710 Scanning Auger Nanoprobe is a high-performance Auger Electron Spectroscopy (AES) instrument designed to provide elemental and chemical state information from sample surfaces, nano-scale features, thin films, and interfaces. It offers superior Auger imaging performance, spatial resolution, sensitivity, and spectral energy resolution, making it suitable for demanding AES applications.

Key Features

• High Spatial Resolution: Achieves SEM resolution ≤ 3 nm and AES resolution ≤ 8 nm, enabling detailed analysis of nano-scale features. 
• Acoustic Enclosure Box: Minimizes the effects of vibration, sound, and temperature changes, allowing Auger analysis at magnifications up to 500,000× under low-drift conditions. 
• Coaxial Cylindrical Mirror Analyzer (CMA): PHI's unique electron spectrometer design captures Auger electrons emitted in 360 degrees from the sample, providing high sensitivity and reducing the impact of sample shape or tilt angle. 
• Chemical State Mapping: Spectrum mapping capability maintains the spectrum for each pixel, enabling chemical state mapping images based on spectral analysis. 
• Versatile Sample Support: Capable of analyzing various sample shapes without shadow effects, ensuring accurate understanding of the sample.

Specifications

Applications

• Nano-scale Surface Analysis: Ideal for analyzing small features, inclusions, and grain boundaries in materials like ductile cast iron. 
• Thin Film and Interface Characterization: Provides detailed information on thin films and interfaces in semiconductor devices. 
• Chemical State Mapping: Enables chemical state mapping of elements such as silicon in semiconductor chips, distinguishing between elemental Si, Si oxynitride, and metal silicide.
• Versatile Material Analysis: Suitable for a wide range of materials, including metals, polymers, and ceramics, due to its high sensitivity and spatial resolution.