Stylus Profiler
Product Overview
The Dektak Pro is an industry-leading stylus profiler designed for high-precision surface metrology. This 11th-generation Dektak system offers exceptional accuracy, ease of use, and enhanced versatility for film thickness, step height, surface roughness, stress, and wafer bow measurements.
With its 4Å repeatability, advanced LIS 3 low-inertia sensor, and automated scanning capabilities, the Dektak Pro is the ideal solution for microelectronics, thick film coatings, and life sciences applications.
Key Features
- High-Resolution Profiling – Achieves 4Å step height repeatability for precise measurements.
- Fast & Accurate Data Collection – Direct-drive scan stage technology ensures fast scanning with minimal noise.
- User-Friendly Software – Vision64® with intuitive GUI, automated multi-scan analysis, and 64-bit parallel processing.
- Versatile Measurement Options – Supports 2D surface profiling, 3D stress mapping, and wafer warpage analysis.
- Wide Stylus Range – Choose from 50nm to 25μm radius tips for different applications.
- Automated & Manual Configurations – Available in 100mm (manual), 150mm (automated), and 200mm (automated encoded) stages.
- Low Force Option for Delicate Samples – N-Lite+ low force sensor (0.03 mg to 15 mg) ensures precise analysis of soft materials.
Specifications
| Feature | Specification |
|---|---|
| Measurement Technique | Stylus Profilometry (Contact Measurement) |
| Scan Length Range | 55 mm (2") – 200 mm (8") with scan stitching |
| Step Height Repeatability | 4Å (1 sigma) on ≤1µm steps |
| Stylus Sensor | LIS 3 Low-Inertia Sensor |
| Stylus Force Range | 1 mg to 15 mg (0.03 mg with N-Lite+ option) |
| Stylus Tip Options | 50 nm to 25 μm (various tip radii available) |
| Sample Stage Sizes | 100mm (manual), 150mm (automated), 200mm (automated encoded) |
| Wafer Compatibility | Up to 200mm (8") wafers |
| Vibration Isolation | Optional isolation table & vacuum pads |
| Software Interface | Vision64® with automated multi-scan analysis |
| Input Power | 100-240V AC, 50/60Hz |
| Operating Temperature | 20-25°C (68-77°F) |
| System Dimensions | 455 mm (W) x 550 mm (D) x 370 mm (H), 34 kg |
Applications
- Microelectronics & Semiconductors – Deposition monitoring, trench depth measurement, sensor height evaluation.
- Thick Film Coatings – Hard coatings, decorative coatings, ink/pigment film thickness.
- Wafer-Level Testing – Wafer bow mapping, stress evaluation, and surface uniformity analysis.
- Medical & Life Sciences – Biomaterial thickness measurement, bio-sensor characterization, and microfluidic channel analysis.
- R&D & Industrial Quality Control –Process development, step height verification, and roughness analysis.
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